Atomic Layer Deposition (ALD) Valves
Swagelok is a global technical leader and solutions provider in semiconductor chip manufacturing applications as well as the originator of ALD valve technology. Our ALD ultrahigh-purity (UHP) valves feature:
- Ultrahigh cycle life with high-speed actuation
- Cv range from 0.27 to 1.7
- Full immersibility up to 392°F (200°C) with thermal actuators
- Suitability for UHP applications with standard 316L VIM-VAR stainless steel body
- Modular surface-mount, tube butt weld, and VCR® end connections
- Electronic or optical actuator position-sensing option
ALD3 and ALD6 UHP Diaphragm Valves
ALD diaphragm valves offer ultrahigh cycle life, high-speed actuation, and flow coefficients up to 0.62, along with thermal actuators, position sensors, and solenoids for optimal performance in atomic layer deposition applications.
Specifications
| Working Pressure | Vacuum to 145 psig (10.0 bar) |
| Burst Pressure | >3200 psig (220 bar) |
| Actuation Pressure | 50 to 90 psig (3.5 to 6.2 bar) |
| Temperature | 32° to 392°F (0° to 200°C) |
| Flow Coefficient (Cv) | 0.27 or 0.62 |
| Body Materials | 316L VIM-VAR stainless steel |
| Diaphragm Material | Cobalt-based superalloy |
| End Connections | |
| Type (Size) | Female VCR® face seal fitting (1/4 in. to 1/2 in.) Male VCR face seal fitting (1/4 in. to 1/2 in.) Modular surface mount high-flow C-seal (1.125 in. to 1.5 in.) |
The ALD20 UHP Valve for High-Flow Applications
The ALD20 UHP valve is the latest addition to the Swagelok family of ALD products. The patent-pending design allows for utilization of challenging low-vapor pressure precursors. The ALD20 features an ultrahigh-purity bellows to promote clean operation and higher flow capacity than other ALD valves.
In addition, the ALD20 valve can be fully thermally immersed in the gas box and heated from 50°F (10°C) up to 392°F (200°C).
Specifications
| Working Pressure | Vacuum to 20 psig (1.4 bar) |
| Burst Pressure | >3200 psig (220 bar) |
| Actuation Pressure | 70 to 90 psig (4.8 to 6.2 bar) |
| Temperature | 50° to 392°F (10° to 200°C) |
| Flow Coefficient (Cv) | 1.2 (MSM) or 1.7 (straight pattern) |
| Body Materials | 316L VIM-VAR or Alloy 22 |
| Bellows Material | Alloy 22 (5 μin. Ra finished) |
| End Connections | |
| Type (Size) | Female VCR® fitting (1/2 in.) Rotable male VCR fitting (1/2 in.) Tube butt weld, 0.50 in. long (1/2 in. x 0.049 in.) Modular surface-mount high-flow C-seal (1.5 in.) |
Push the Limits of ALD Technology
Featured: Swagelok ALD20 UHP Valve
Our new ALD20 UHP valve’s high-temperature and high-flow performance opens up opportunities to work with chemistries that were previously challenging to utilize effectively, allowing fabricators to make progress toward the next generation of chip technology.
Download the ALD ultrahigh-purity valve catalog
Questions? Locate a sales and service center.
| Safe Product Selection: The complete catalog contents must be reviewed to ensure that the system designer and user make a safe product selection. When selecting products, the total system design must be considered to ensure safe, trouble-free performance. Function, material compatibility, adequate ratings, proper installation, operation, and maintenance are the responsibilities of the system designer and user. Caution: Do not mix/interchange Swagelok two-ferrule tube-fitting end connection components (or other products not governed by industrial design standards) with those of other manufacturers. |