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High Purity Filter

High Purity Filters

  • Meet stringent ultrahigh-purity gas system filtering requirements of SEMI E49.8-96 (SCF series)
  • Have inline, all-welded construction (FW Series)

All-Welded Inline Filters (FW Series)

Specifications

Working Pressure Up to 6000 psig (413 bar)
Differential Pressure Up to 600 psi (41.3 bar)
Temperature -20 to 900°F (–28 to 482°C)
Body Material 316 stainless steel
Element
   Material Sintered 316L stainless steel or pleated mesh stainless steel
   Nominal Pore Size 0.5 through 15 µm
End Connections
   Type Swagelok tube fitting, NPT, VCR® face seal fittings
   Size 1/4 in.; 6 mm

Ultrahigh-Purity (UHP) Gas Filters (SCF Series)

Specifications

Working Pressure Up to 3000 psig (206 bar)
Differential Pressure Up to 2500 psi (172 bar)
Temperature Up to 400°F (200°C)
Maximum Flow Rate 2700 std L/min
Body Material 316L VAR stainless steel
Internal Surface Finish Electropolished, 5 µin (0.13 µm) Ra
Element
   Material High-purity alumina
   Removal Rating > 99.999999 % at 0.003 µm
End Connections
   Type VCR face seal fittings
   Size 1/4, 1/2, and 3/4 in.

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"Safe Product Selection: The complete catalog contents must be reviewed to ensure that the system designer and user make a safe product selection. When selecting products, the total system design must be considered to ensure safe, trouble-free performance. Function, material compatibility, adequate ratings, proper installation, operation, and maintenance are the responsibilities of the system designer and user.

Caution:
Do not mix or interchange product components with those of other manufacturers."