Swagelok ALD20 UHP Valve

Enabling What’s Next

The ALD20 provides the reliability and performance that customers have come to expect from Swagelok’s ultrahigh-purity atomic layer deposition (ALD) valves while also opening up temperature stability and flow possibilities previously unattainable. It enables manufacturers to experiment with different processes and low-vapor pressure chemistries to achieve the uniform gas deposition needed to develop advanced technology today and tomorrow.

Improved Flow. Minimized Footprint.

The new ALD20 UHP valve is specifically designed to extend the limits of atomic layer deposition valve technology, enabling flow rates two to three times what can be achieved using existing ALD valves. It gives semiconductor chip manufacturers the potential to not only boost outputs and improve efficiency, but to do so without significantly changing processes.

• The ALD20 can deliver a flow rate of 1.2 C_v in the same footprint (1.5 in.) as existing ALD valves, offering improved performance without requiring retooling of existing equipment.
• A second standard ALD20 valve variant that features a slightly larger footprint width (1.75 in.) can yield an even greater flow rate of 1.7 C_v—the highest currently available from an ultrahigh-cycle UHP valve.
• Custom-set flow coefficients are also available.

Uncompromising Consistency

The design of the ALD20 promotes consistent operation over the course of an ultrahigh cycle life due to a few key features:

• The entire valve and actuator are fully immersible in a gas box from 50°F (10°C) up to 392°F (200°C), eliminating the need to isolate the actuator during heating. Deposition consistency improves as a result, with low-vapor pressure gases kept at temperatures conducive to optimal flow.
• 316L VIM-VAR stainless steel or Alloy 22 body material options offer enhanced corrosion resistance to withstand increasingly aggressive media.
• A highly polished bellows with a 5 μin. R_a finish supports clean operation over the course of an ultrahigh cycle life for process integrity.
• A pneumatic actuator can deliver high-speed (<10 ms), repeatable actuation for precise, consistent flow to meet dosing requirements.

Specifications

For more information about how the ALD20 UHP valve can help improve precision and performance in semiconductor chip manufacturing applications without sacrificing consistency or repeatability, contact your local Swagelok sales and service center.