Swagelok® Thermal-Immersion Diaphragm Valves
An increasing number of applications today require high precursor temperatures, often up to 220°C (428°F), with very tight temperature controls. System designers may specify an oven enclosure for the entire gas system to precisely control these high temperatures. This demands a valve that can be entirely situated within the high-temperature environment, including the body and actuator.

Swagelok thermal-immersion diaphragm valves offer high-speed actuation, flow coefficients up to 0.60, and are designed for optimum performance at  220°C (428°F) for high-temperature processes including atomic layer deposition (ALD) and precursor delivery applications. They are offered in both pneumatically actuated and manual models with a variety of 1/4 and 3/8 in. end connections.

Specifications  Working Pressure Burst Pressure Actuation Pressure Temperature Flow Coefficient (Cv) • "H" type VCR® connections • VCR and all other connections • Modular surface-mount body Body Material Diaphragm Material End Connections • Type • Size

Vacuum to 70 psig (4.8 bar) > 3200 psig (220 bar) 60 to 90 psig (4.1 to 6.2 bar) 20 to 220°C (70 to 428°F) 0.60 at 20°C (70°F); 0.40 at 220°C (428°F) 0.30 at 20°C (70°F); 0.21 at 220°C (428°F) 0.25 at 20°C (70°F); 0.21 at 220°C (428°F) 316L VIM-VAR stainless steel Elgiloy® VCR and "H" type VCR metal gasket face seal fittings, tube butt weld; modular surface mount (MSM) 1/4 and 3/8 in. 1.125 and 1.5 in. MSM

More Information
Contact your authorized Swagelok sales and service representative.

More Ultrahigh-Purity Diaphragm Valves
Diaphragm valves for atomic layer deposition—ALD series
High-flow, springless diaphragm valves—DF series
Springless diaphragm valves for high performance—DP series

Features

Thermal Immersion Diaphragm Valve Process Specification

• Ultrahigh-purity, P process: Ultrahigh-Purity Process Specification (SC-01)
  • Ultrahigh-purity cleaning with a continuously monitored, deionized water, ultrasonic cleaning system
  • Performed in ISO Class 4 work areas; valves are double bagged and vacuum sealed in cleanroom bags
  • 5 µin. (0.13 µm) average wetted surface roughness, machine finished and electropolished.

Thermal Immersion Diaphragm Valve Testing

• 1 × 10 ^–9 std cm³/s envelope leak rate
• 1 × 10 ^–6 std cm³/s seat leak rate at 220°C (428°F)

Configurations

Valve with Modular Surface-Mount Platform	2-Port Valve

• Two-port straight and elbow configurations
• Two-, three-, and four-port multiport and multivalve manifolds
• Two- and three-port modular surface mount in 1.125 and 1.5 in. platforms
• Additional configurations available on request