Specifications Pressure Rating Media Temperature Flow Coefficient Body, Diaphragm Material End Connections • Types • Sizes Configurations

Up to 100 psig (6.8 bar) 73 to 212°F (23 to 100°C) Up to 10.2 DuPont® Teflon® modified PTFE Fine thread flare and Nippon Pillar Super 300® standard; ISO, NPT, Flowell 1/4 to 1 1/4 in. and 6 to 25 mm 2- and 3-way manual and pneumatic shutoff; adjustable flow and bypass models

More Information
Download these Swagelok DRP series ultrahigh-purity diaphragm valve catalogs and technical reports:

• Ultrahigh-Purity Fluoropolymer Diaphragm Valves
• Ultrahigh-Purity Fluoropolymer Diaphragm Valve Technical Report Abstracts
• Ultrahigh-Purity Fluoropolymer 3-Way Diaphragm Valve Technical Report Abstracts

Find DRP series valves in the products search.
See an animated DRP series fluoropolymer diaphragm valves product demonstration.
Contact your authorized Swagelok sales and service representative.

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PFA fittings
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UHP fluoropolymer check valves

Applications
The Swagelok DRP series ultrahigh-purity diaphragm valve is manufactured to meet SEMI standard F57-0301 specifications for UHP chemical distribution systems and equipment and offers solutions for:

• Aggressive chemical mechanical planarization (CMP) slurry systems
• DI water systems
• Bulk chemical delivery systems
• Aggressive acids, bases, and other chemicals

Features

• Improved patented flow path
• Hemispherical valve cavity and unique diaphragm shape minimize entrapment areas.
• All wetted surfaces clean rapidly and purge free of process fluids of contaminants.
• Flow path minimizes fluid shear for reduced slurry agglomeration
  
• Extended diaphragm life
• Modified PTFE diaphragm promotes durability, seal integrity, and long cycle life
• Patented modified PTFE diaphragm shape is optimized to minimize stress during cycling.
  
• Enhanced design
• Patented diaphragm rim seals off valve cavity.
• Web thickness of the diaphragm has been maximized to reduce the potential for acid permeation.
• Design minimizes opportunity for process fluid contamination.
• No exposed metals.
• Soft-acting spring closure helps prevent hydraulic shock, particle generation, and damage to the seat seal, as well as compensating for material creep.
• Open and closed valve status is indicated.
• Ease of diaphragm replacement facilitates maintenance.

Testing
Every Swagelok DRP series ultrahigh-purity diaphragm valve is factory leak tested.

Cleaning and Packaging
Every Swagelok DRP series ultrahigh-purity diaphragm valve is cleaned and packaged in accordance with SEMI Standard F57-0301 for ultrahigh-purity fluid system components.

Options

• Manual and pneumatic valves with adjustable flow and bypass features
• Manual valves with integral lockout handles.
• Custom valve manifolds
• Snap-in mounting brackets.
• PFA fine thread flare nuts available in place of standard PVDF nuts
• Diaphragm replacement kits enable fast and easy maintenance with the valve inline.
• ISO, NPT, and other end connections are available.

Valves with adjustable flow and bypass	Integral lockout handle	Custom manifolds