Specifications Working Pressure Burst Pressure Actuation Pressure Temperature Flow Coefficient Body Material Diaphragm Material End Connections • Type • Size

Vacuum to 300 psig (20.6 bar) 3200 psig (220 bar) 70 to 100 psig (4.9 to 6.8 bar) –10 to 270°F (–23 to 132°C) 0.62 316L VAR stainless steel Elgiloy® "H" type VCR® face seal fitting, VCR face seal fitting, tube butt weld 1/4, 3/8, 1/2 in.; 10 and 12 mm

More Information
Download the High-Flow, Springless Diaphragm Valves—DF Series catalog.
Download the DF Series Diaphragm Valve Technical Report.
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Features

• No springs or threads in wetted areas improves cleanliness
• Fully swept flow path enhances purging and gas replacement
• Minimal PCTFE volume minimizes gas adsorption and desorption
• Fully contained seat insert increases cycle life
• Normally closed and normally open pneumatic actuators available for remote actuation
• Round and integral lockout handles available for manual actuation.
• Three-quarter turn actuation
• Choice of seven handle colors

Ultrahigh-Purity Springless Diaphragm Valve Process Specifications

• Special cleaning, process designator P1: Special Cleaning and Packaging (SC-11)
  • Special cleaning with non–ozone-depleting chemicals
  • Performed in specially cleaned areas; valves are individually bagged
  • 5 µin. (0.13 µm) average, machine finished.
• Ultrahigh-purity, process designator P: Ultrahigh-Purity Process Specification (SC-01)
  • Ultrahigh-purity cleaning with a continuously monitored, deionized water, ultrasonic cleaning system
  • Performed in ISO Class 4 work areas; valves are double bagged and vacuum sealed in cleanroom bags
  • 5 µin. (0.13 µm) average, machine finished and electropolished.

Ultrahigh-Purity Springless Diaphragm Valve Testing
Inboard and internal helium leak tested to a maximum leak rate of 1 × 10^–9 std cm³/s in accordance with SEMI F1.

Configurations

Multiport Valve	Multivalve Manifolds

• Two-port pneumatic valves
• Two-port manual valves
• Multiport and elbow valves
• Multivalve manifolds
  

Options