Specifications Pressure Rating • Inlet • Outlet Range Preset Outlet Pressures Temperature Rating • Operating • Bakeout Flow

Vacuum to 1000 psig (68.9 bar) through vacuum to 3000 psig (206 bar) Vacuum to 150 psig (10.3 bar) 10, 20, 30, 50, 80 psig (0.68, 1.3, 2.0, 3.4, 5.5 bar) –10 to 150°F (–23 to 65°C) 302° F (150° C) Up to 300 std L/min

More Information
Download the Compact High-Flow Gas Regulators—HF Series catalog.
Download the HF Series Set-Pressure Regulator Technical Report.
Find high-purity gas regulators in the product search.

Other Regulators
High-flow, manual gas regulators
Pressure-reducing regulators
Back-pressure regulators
Specialty regulators

Features

• Compact, high-flow design is less than half the size of conventional diaphragm pressure regulators
• Innovative gas-actuated pressure-sensing assembly:
• Low supply-pressure effect ensures precise pressure control
• Low droop eliminates the need for adjustment in many systems
• Outlet tolerates maximum rated inlet pressure without damage
• Self-centering PCTFE poppet minimizes outlet pressure creep
• Tamper-free design
• Reduces potential of improper adjustment
• Simplifies installation
• High-purity design
• Tied poppet for clean operation and positive shutoff
• all-welded design—no seals to atmosphere
• 316L VIM-VAR stainless steel body material
• Internal wetted surfaces electropolished to 5 µin. (0.13 µm) and processed in accordance with Swagelok Ultrahigh-Purity Process Specification (SC-01)
• Choice of end connection/mounting styles
• 1/4 in. high-flow HVCR® ends
• 1/4 in. VCR ends
• 1/4 and 3/8 in. butt weld ends
• 1.50 in. C-seal modular surface mount

Preset High-Purity Gas Regulator Models
Preset pressure gas regulator models are factory-charged with an inert gas mix to deliver 10, 20, 30, 40,50, or 80 psig (0.68, 1.3, 2.0, 3.4, or 5.5 bar) outlet pressures.

Dome-Loaded High-Purity Gas Regulator Models
Dome-loaded gas regulators may be adjusted during operation using a pilot regulator or can be factory-charged to deliver 10, 20, 30, or 50 psig (0.68, 1.3, 2.0, or 3.4 bar) outlet pressures.

Options
Swagelok VCR split-nut assemblies