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Home > Products > Valves > Diaphragm-Sealed Valves > Ultrahigh Purity, High-Flow Diaphragm Valves (CV = 0.62), Shutoff
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Ultrahigh Purity High-Flow Diaphragm Valves

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High-Flow, Springless Diaphragm Valves—DF Series

DF Series High Purity High Flow Diaphragm Valves

Swagelok® DF Series diaphragm valves are designed for a wide range of ultrahigh-purity, high-flow applications, with a flow coefficient of 0.62 and available high-flow end connections.


Specifications

Working Pressure
Burst Pressure
Actuation Pressure
Temperature
Flow Coefficient
Body Material
Diaphragm Material
End Connections
• Type

• Size


Vacuum to 300 psig (20.6 bar)
3200 psig (220 bar)
70 to 100 psig (4.9 to 6.8 bar)
–10 to 270°F (–23 to 132°C)
0.62
316L VAR stainless steel
Elgiloy®

"H" type VCR® face seal fitting, VCR face seal fitting, tube butt weld
1/4, 3/8, 1/2 in.; 10 and 12 mm

Features

  • No springs or threads in wetted areas improves cleanliness
  • Fully swept flow path enhances purging and gas replacement
  • Minimal PCTFE volume minimizes gas adsorption and desorption
  • Fully contained seat insert increases cycle life
  • Normally closed and normally open pneumatic actuators available for remote actuation
  • Round and integral lockout handles available for manual actuation.
    • Three-quarter turn actuation
    • Choice of seven handle colors

Ultrahigh-Purity Springless Diaphragm Valve Process Specifications

  • Special cleaning, process designator P1: Special Cleaning and Packaging (SC-11)
    • Special cleaning with non–ozone-depleting chemicals
    • Performed in specially cleaned areas; valves are individually bagged
    • 5 µin. (0.13 µm) average, machine finished.
  • Ultrahigh-purity, process designator P: Ultrahigh-Purity Process Specification (SC-01)
    • Ultrahigh-purity cleaning with a continuously monitored, deionized water, ultrasonic cleaning system
    • Performed in ISO Class 4 work areas; valves are double bagged and vacuum sealed in cleanroom bags
    • 5 µin. (0.13 µm) average, machine finished and electropolished.

Ultrahigh-Purity Springless Diaphragm Valve Testing

Inboard and internal helium leak tested to a maximum leak rate of 1 × 10 –9 std cm 3 /s in accordance with SEMI F1.

Configurations

DF Series Ultrahigh Purity Diaphragm Valves DF Series Manifold Diaphragm Valves
Multiport Valve Multivalve Manifolds
  • Two-port pneumatic valves
  • Two-port manual valves
  • Multiport and elbow valves
  • Multivalve manifolds

Options

  • Pneumatic actuators
    • Factory-assembled indicator switch and indicator switch kits available
  • High-temperature polyimide seat
    • Temperature rating from 50 to 270°F (10 to 132°C)
  • Panel mounting available for round-handle valves.
  • Diaphragm replacement kits available
  • Actuator replacement kits available.
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