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An increasing number of applications today require high precursor temperatures, often up to 220°C (428°F), with very tight temperature controls. System designers may specify an oven enclosure for the entire gas system to precisely control these high temperatures. This demands a valve that can be entirely situated within the high-temperature environment, including the body and actuator.
Swagelok thermal-immersion diaphragm valves offer high-speed actuation, flow coefficients up to 0.60, and are designed for optimum performance at 220°C (428°F) for high-temperature processes including atomic layer deposition (ALD) and precursor delivery applications. They are offered in both pneumatically actuated and manual models with a variety of 1/4 and 3/8 in. end connections.
Working Pressure Burst Pressure Actuation Pressure Temperature Flow Coefficient (Cv) • "H" type VCR® connections • VCR and all other connections • Modular surface-mount body Body Material Diaphragm Material End Connections • Type • Size
Vacuum to 70 psig (4.8 bar) > 3200 psig (220 bar) 60 to 90 psig (4.1 to 6.2 bar) 20 to 220°C (70 to 428°F) 0.60 at 20°C (70°F); 0.40 at 220°C (428°F) 0.30 at 20°C (70°F); 0.21 at 220°C (428°F) 0.25 at 20°C (70°F); 0.21 at 220°C (428°F) 316L VIM-VAR stainless steel Elgiloy® VCR and "H" type VCR metal gasket face seal fittings, tube butt weld; modular surface mount (MSM) 1/4 and 3/8 in. 1.125 and 1.5 in. MSM
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Do not use the Cv Calculator for pressure regulators. Use the flow curves in the product catalog.
Swagelok biopharm fittings are inspected by an independent third-party inspection service, Purity Systems Incorporated, to meet ASME-BPE fitting standards.
Use this tool to search for your third party inspection documentation. Simply enter the lot number marked on the product and click search. Links to inspection documentation will be displayed below.
Search Swagelok Biopharm Services Company's material test report documentation by the heat number marked on the fitting.
Search Swagelok Biopharm Services Company's rubber gasket compliance report documentation by the lot number marked on the gaskets.