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Home > Products > Valves > Diaphragm-Sealed > Thermal-Immersion-Diaphragm-Valves

Thermal-Immersion-Diaphragm-Valves

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Swagelok® Thermal-Immersion Diaphragm Valves

Thermal Immersion Diaphragm Valves

An increasing number of applications today require high precursor temperatures, often up to 220°C (428°F), with very tight temperature controls. System designers may specify an oven enclosure for the entire gas system to precisely control these high temperatures. This demands a valve that can be entirely situated within the high-temperature environment, including the body and actuator.


Swagelok thermal-immersion diaphragm valves offer high-speed actuation, flow coefficients up to 0.60, and are designed for optimum performance at 220°C (428°F) for high-temperature processes including atomic layer deposition (ALD) and precursor delivery applications. They are offered in both pneumatically actuated and manual models with a variety of 1/4 and 3/8 in. end connections.


Specifications

Working Pressure
Burst Pressure
Actuation Pressure
Temperature
Flow Coefficient (Cv)
• "H" type VCR®
connections

• VCR and all other connections

• Modular surface-mount
body

Body Material
Diaphragm Material
End Connections
• Type


• Size


Vacuum to 70 psig (4.8 bar)
> 3200 psig (220 bar)
60 to 90 psig (4.1 to 6.2 bar)
20 to 220°C (70 to 428°F)

0.60 at 20°C (70°F);
0.40 at 220°C (428°F)

0.30 at 20°C (70°F);
0.21 at 220°C (428°F)

0.25 at 20°C (70°F);
0.21 at 220°C (428°F)

316L VIM-VAR stainless steel
Elgiloy®

VCR and "H" type VCR metal gasket face seal fittings, tube butt weld; modular surface mount (MSM)
1/4 and 3/8 in.
1.125 and 1.5 in. MSM

Features

  • Normally closed pneumatic actuation.
    • Capable of valve opening or closing time of less than 5 ms
  • Manual actuation with a lock-out handle
  • Fully contained high-purity grade PFA seat offers broad range of chemical compatibility and excellent resistance to swelling and contamination
  • Fully swept flow path:
    • Minimizes entrapment areas
    • Facilitates purging
    • Maximizes flow capacity
  • Fully immersible at temperature

Thermal Immersion Diaphragm Valve Process Specification

  • Ultrahigh-purity, P process: Ultrahigh-Purity Process Specification (SC-01)
    • Ultrahigh-purity cleaning with a continuously monitored, deionized water, ultrasonic cleaning system
    • Performed in ISO Class 4 work areas; valves are double bagged and vacuum sealed in cleanroom bags
    • 5 µin. (0.13 µm) average wetted surface roughness, machine finished and electropolished.

Thermal Immersion Diaphragm Valve Testing

  • 1 × 10 –9 std cm3/s envelope leak rate
  • 1 × 10 –6 std cm3/s seat leak rate at 220°C (428°F)

Configurations

Thermal Immersion Diaphragm Valve with Modular Surface Mount Platform 2-Port Thermal Immersion Diaphragm Valve
Valve with Modular Surface-Mount Platform 2-Port Valve

  • Two-port straight and elbow configurations
  • Two-, three-, and four-port multiport and multivalve manifolds
  • Two- and three-port modular surface mount in 1.125 and 1.5 in. platforms
  • Additional configurations available on request
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