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Home > Products > Valves > Diaphragm-Sealed Valves > Radial Diaphragm, Modified PTFE
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Radical Diaphragm Modified PTFE

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Diaphragm Valves, Ultrahigh-Purity Fluoropolymer—DRP Series

Diaphragm Valves Ultrahigh-Purity Fluoropolymer DRP Series

Meeting SEMI Standard F57-0301 for UHP chemical distribution systems and equipment, the Swagelok® DRP series' ultrahigh-purity diaphragm enhanced design helps minimize entrapment areas and extend diaphragm life. DRP series valves are available in a variety of configurations, including: pneumatic and quarter-turn manual 2-way and 3-way shutoff valves, models with adjustable flow and bypass features, and custom manifolds.


Specifications

Pressure Rating
Media Temperature
Flow Coefficient
Body, Diaphragm Material
End Connections
• Types


• Sizes
Configurations


Up to 100 psig (6.8 bar)
73 to 212°F (23 to 100°C)
Up to 10.2
Modified PTFE

Fine thread flare and Nippon Pillar Super 300® standard; ISO, NPT, Flowell
1/4 to 1 1/4 in. and 6 to 25 mm
2- and 3-way manual and pneumatic shutoff; adjustable flow and bypass models

Applications

The Swagelok DRP series ultrahigh-purity diaphragm valve is manufactured to meet SEMI standard F57-0301 specifications for UHP chemical distribution systems and equipment and offers solutions for:

  • Aggressive chemical mechanical planarization (CMP) slurry systems
  • DI water systems
  • Bulk chemical delivery systems
  • Aggressive acids, bases, and other chemicals

Features

  • Improved patented flow pathDiaphragm Valves Ultrahigh Purity Fluoropolymer DRP Series 2 Way Cutaway
    • Hemispherical valve cavity and unique diaphragm shape minimize entrapment areas.
    • All wetted surfaces clean rapidly and purge free of process fluids of contaminants.
    • Flow path minimizes fluid shear for reduced slurry agglomeration
  • Extended diaphragm life
    • Modified PTFE diaphragm promotes durability, seal integrity, and long cycle life
    • Patented modified PTFE diaphragm shape is optimized to minimize stress during cycling.
  • Enhanced design
    • Patented diaphragm rim seals off valve cavity.
    • Web thickness of the diaphragm has been maximized to reduce the potential for acid permeation.
    • Design minimizes opportunity for process fluid contamination.
    • No exposed metals.
    • Soft-acting spring closure helps prevent hydraulic shock, particle generation, and damage to the seat seal, as well as compensating for material creep.
    • Open and closed valve status is indicated.
    • Ease of diaphragm replacement facilitates maintenance.

Testing

Every Swagelok DRP series ultrahigh-purity diaphragm valve is factory leak tested.


Cleaning and Packaging

Every Swagelok DRP series ultrahigh-purity diaphragm valve is cleaned and packaged in accordance with SEMI Standard F57-0301 for ultrahigh-purity fluid system components.


Options

  • Manual and pneumatic valves with adjustable flow and bypass features
  • Manual valves with integral lockout handles.
  • Custom valve manifolds
  • Snap-in mounting brackets.
  • PFA fine thread flare nuts available in place of standard PVDF nuts
  • Diaphragm replacement kits enable fast and easy maintenance with the valve inline.
  • ISO, NPT, and other end connections are available.

Diaphragm Valves with Adjustable Flow and Bypass Ultrahigh Purity Fluoropolymer DRP Series Diaphragm Valves Integral Lockout Handle Ultrahigh Purity Fluoropolymer DRP Series Custom Manifolds Diaphragm Valves Ultrahigh Purity Fluoropolymer DRP Series

Valves with adjustable flow
and bypass

Integral lockout handle

Custom manifolds

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