Features

• Normally closed and normally open pneumatic actuation.
  • Standard and thermal actuators
  • Capable of valve opening or closing time of less than 5 ms
  • Factory-seat flow adjusting mechanism for precise, consistent Cv
• Fully contained high-purity grade PFA seat offers broad range of chemical compatibility and excellent resistance to swelling and contamination
• Fully swept flow path:
  • Minimizes entrapment areas
  • Facilitates purging
  • Maximizes flow capacity

Atomic Layer Deposition (ALD) DIaphragm Valve Process Specifications

• Ultrahigh-purity, process designator P: Ultrahigh-Purity Process Specification (SC-01)
  • Ultrahigh-purity cleaning with a continuously monitored, deionized water, ultrasonic cleaning system
  • Performed in ISO Class 4 work areas; valves are double bagged and vacuum sealed in cleanroom bags
  • 5 µin. (0.13 µm) average wetted surface roughness, machine finished and electropolished.

Atomic Layer Deposition (ALD) Diaphragm Valve Testing

• ALD3 normally closed: Inboard helium leak tested to a rate of 1 × 10^–9 std cm³/s at the seat, envelope, and all seals.
• ALD3 and ALD6 normally open and ALD6 normally closed: Inboard helium leak tested to a rate of 1 × 10^–8 std cm³/s at the seat and to a rate of 1 × 10^–9 std cm³/s at the envelope and all other seals.

Configurations

• Two-port straight and elbow configurations
• Two-, three-, and four-port multiport valves and multivalve manifolds
• Two- and three-port modular surface mount in 1.125 in. (ALD3 series only) and 1.5 in platforms

2-Port Valve Normally Open Standard Actuator	Multiport Valve Normally Closed Thermal Actuator	Multivalve Manifold Normally Closed Standard Actuator

Options

ALD Valve with Electronic Actuator-Position Sensor and Solenoid Pilot Valve

• Electronic actuator-position sensor transmits a signal to an electrical device indicating the open position.
• Solenoid pilot valve enhances ALD valve response time.
• ALD valves are available with holes in the body to accommodate heater cartridges.