Diaphragm-Sealed Valves for High-Purity, Ultrahigh-Purity, and Biopharmaceutical Service
Swagelok diaphragm-sealed valves are available in a wide variety of sizes, materials, and configurations to fill your needs for high-purity, ultrahigh-purity, and biopharmaceutical applications.
High-Purity
Valves |
Ultrahigh-Purity
Valves |
Biopharmaceutical
Valves |
| DL and DS series |
DP series |
DR series |
| LD series |
DF series |
DW series |
|
ALD series |
|
|
DRP series |
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Diaphragm-Sealed Valves—DL Series and DS Series
Swagelok® DL series and DS series diaphragm valves offer packless, all metal containment for high-purity and ultrahigh-purity applications up to 3500 psig.
SpecificationsWorking Pressure
Temperature
Flow Coefficient
Body Material
Diaphragm Material
End Connections
• Type
• Size |
Up to 3500 psig (241 bar)
–100 to 250°F (–73 to 121°C)
Up to 0.30
316L stainless steel
316 stainless steel
Swagelok tube fitting, VCR® face seal fitting, VCO® O-ring fitting, tube butt weld, tube socket weld
1/4, 3/8, and 1/2 in.; 6 and 8 mm
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Bulk Gas Diaphragm Valves—LD Series
With flow coefficients up to 13 and a variety of body materials and configurations, Swagelok® LD series bulk gas diaphragm valves can support a wide range of ultrahigh-purity shutoff, bulk-gas distribution, and isolation applications.
SpecificationsWorking Pressure Temperature
Flow Coefficient
Body Material
Diaphragm Material
End Connections
• Type
• Size |
Up to 300 psig (20.6 bar)
–20 to 300° F (–28 to 148°C)
Up to 13
CF3M cast stainless steel, forged and bar stock 316L stainless steel
316L stainless steel
Swagelok tube fitting, male VCR® face seal fitting, female NPT, female ISO, tube extension
1/4 to 1 in.; 12 to 25 mm
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Springless Diaphragm Valves for High Performance—DP Series
With 316L VIM-VAR construction, Swagelok® DP series
diaphragm-sealed valves are suitable for a variety of ultrahigh-purity
applications.
Specifications
Working Pressure
Burst Pressure
Actuation Pressure
Temperature
Flow Coefficient
Body Material
Diaphragm Material
End Connections
• Type
• Size
|
Vacuum to 3045 psig (210 bar)
Up to 12 200 psig (840 bar)
60 to 120 psig (4.2 to 8.2 bar)
–10 to 300°F (–23 to 150°C)
0.20 and 0.27
316L VIM-VAR stainless steel
Elgiloy®
VCR® face seal fitting, tube butt weld, Swagelok tube fitting,
modular surface-mount (MSM)
1/4 in.; 6 mm
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High-Flow, Springless Diaphragm Valves—DF Series
Swagelok® DF Series diaphragm valves are designed for a wide
range of ultrahigh-purity, high-flow applications, with a flow
coefficient of 0.62 and available high-flow end connections.
Specifications
Working Pressure
Burst Pressure
Actuation Pressure
Temperature
Flow Coefficient
Body Material
Diaphragm Material
End Connections
• Type
• Size
|
Vacuum to 300 psig (20.6 bar)
3200 psig (220 bar)
70 to 100 psig (4.9 to 6.8 bar)
–10 to 270°F (–23 to 132°C)
0.62
316L VAR stainless steel
Elgiloy®
"H" type VCR® face seal fitting, VCR face seal fitting, tube butt
weld
1/4, 3/8, 1/2 in.; 10 and 12 mm
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Swagelok® Diaphragm Valves for Atomic Layer Deposition (ALD)
Swagelok ALD diaphragm valves offer ultrahigh cycle life, high-speed actuation, and flow coefficients up to 0.62, along with thermal actuators, position sensors, and solenoids for optimal performance in atomic layer deposition applications.
SpecificationsWorking Pressure
Burst Pressure
Actuation Pressure
Temperature
Flow Coefficient
Body Material
Diaphragm Material
End Connections
• Type
• Size |
Vacuum to 145 psig (10.0 bar)
>3200 psig (220 bar)
50 to 90 psig (3.5 to 6.2 bar)
32 to 392°F (0 to 200°C)
0.27 or 0.62
316L VIM-VAR stainless steel
Elgiloy®
VCR® face seal fitting, tube butt weld; modular surface mount (MSM)
1/4 to 1/2 in.; 6 to 12 mm;
1.125 and 1.5 in. MSM |
Diaphragm Valves, Ultrahigh-Purity Fluoropolymer—DRP Series
Meeting SEMI Standard F57-0301 for UHP chemical distribution systems and equipment, the Swagelok® DRP series' ultrahigh-purity diaphragm enhanced design helps minimize entrapment areas and extend diaphragm life. DRP series valves are available in a variety of configurations, including: pneumatic and quarter-turn manual 2-way and 3-way shutoff valves, models with adjustable flow and bypass features, and custom manifolds.
SpecificationsPressure Rating
Media Temperature
Flow Coefficient
Body, Diaphragm Material
End Connections
• Types
• Sizes
Configurations |
Up to 100 psig (6.8 bar)
73 to 212°F (23 to 100°C)
Up to 10.2
Modified PTFE
Fine thread flare and Nippon Pillar Super 300® standard; ISO, NPT, Flowell
1/4 to 1 1/4 in. and 6 to 25 mm
2- and 3-way manual and pneumatic shutoff; adjustable flow and bypass models
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Radial Diaphragm Valves—DR Series
The Swagelok® DR series radial diaphragm valve offers a cleaner,
more compact way to manage sterile flow streams for many applications:
media preparation, fermentation, harvest, separation, refining,
purification, CIP, and SIP systems. The single-body biopharm valve
design can be manufactured in a wide range of configurations to include
multiple valves and multiple ports, and point-of-use valves. A single
Swagelok radial diaphragm valve can replace complex weir-style valve
assemblies, resulting in a more compact system.
Specifications
Working Pressure
Temperature
Diaphragm Material
Body Material
Flow Coefficients
Internal Surface Finish
Valve Sizes
End Connections
|
Up to 150 psig (10.3 bar)
Up to 280°F (137°C)
Modified PTFE
316L stainless steel
1.6 to 27.2
Electropolished and finished to
15 µin. (0.38 µm) avg
1/2 to 2 in.
Tube butt weld, TS series sanitary clamp, and Kwik-Clamp |
Swagelok® Thermal-Immersion Diaphragm Valves
An increasing number of applications today require high precursor temperatures, often up to 220°C (428°F), with very tight temperature controls. System designers may specify an oven enclosure for the entire gas system to precisely control these high temperatures. This demands a valve that can be entirely situated within the high-temperature environment, including the body and actuator.
Swagelok thermal-immersion diaphragm valves offer high-speed actuation, flow coefficients up to 0.60, and are designed for optimum performance at 220°C (428°F) for high-temperature processes including atomic layer deposition (ALD) and precursor delivery applications. They are offered in both pneumatically actuated and manual models with a variety of 1/4 and 3/8 in. end connections.
SpecificationsWorking Pressure
Burst Pressure
Actuation Pressure
Temperature
Flow Coefficient (Cv)
• "H" type VCR®
connections
• VCR and all other connections
• Modular surface-mount
body
Body Material
Diaphragm Material
End Connections
• Type
• Size |
Vacuum to 70 psig (4.8 bar)
> 3200 psig (220 bar)
60 to 90 psig (4.1 to 6.2 bar)
20 to 220°C (70 to 428°F)
0.60 at 20°C (70°F);
0.40 at 220°C (428°F)
0.30 at 20°C (70°F);
0.21 at 220°C (428°F)
0.25 at 20°C (70°F);
0.21 at 220°C (428°F)
316L VIM-VAR stainless steel
Elgiloy®
VCR and "H" type VCR metal gasket face seal fittings, tube butt weld; modular surface mount (MSM)
1/4 and 3/8 in.
1.125 and 1.5 in. MSM
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