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Home > Products > Miniature Modular Systems > Ultrahigh Purity IGC II Integrated Gas Components

Ultrahigh Purity IGC II Integrated Gas Components

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IGC II Surface Mounts and Gaskets
 

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Swagelok® IGC® II Integrated Gas Components

1.5 in (38.1 mm) C-Ring Modular Design for Ultrahigh-Purity (UHP) Systems

IGC II Integrated Gas Components

The Swagelok IGC II system consists of lightweight, easy-to-assemble components and standard hardware that can be customized for any flow configuration. Ultrahigh-purity processing in accordance with Swagelok SC-01 is standard for substrate and manifold components. The IGC II System Configurator simplifies the layout, selection, and ordering of IGC II integrated gas system components.


Substrate/Manifold
Specifications

• Pressure Rating at 70°F (20°C)
• Temperature Rating

• Wetted Materials
• Internal Surface Finish




3000 psig (206 bar)


248°F (120°C) operating
302°F (150°C) bakeout
316L VIM-VAR stainless steel
5 µin. (0.13 µm) Ra

Features

IGC II System IGC System Components

A typical IGC II system consists of three layers—a substrate assembly, a manifold assembly, and mounting components.


  • The substrate assembly provides the flow path for the process gas through the gas stick.
  • The manifold assembly provides the flow path between two or more parallel gas sticks.
  • The substrate-manifold assembly accepts any 1.5 in. (38.1 mm) C-ring surface-mount component.

A conversion plate provides the mounting capacity for a mass flow controller, and a tube port is available to provide a 1/4 in. vertical tube port on a manifold or substrate.


Swagelok Surface-Mount Components

  • Low-pressure diaphragm valves, DP series
  • Bellows-sealed metering valves, BM series
  • Atomic layer deposition valves, ALD valves
  • High-flow regulators, HF series
  • Ultrahigh-purity pressure gauges,
    PGU series
  • Ultrahigh-purity pressure transducers,
    PTU series

Gaskets and Gasket Assemblies

  • C-ring style seal for a 1.5 in. (38.1 mm) modular system
  • 316L stainless steel material of construction
  • Helium leak-tight integrity to less than 1 × 10–9 std cm3/s
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