SCF Series Ultrahigh-Purity (UHP) Gas Filters
The Swagelok SCF series UHP gas filter is designed to meet the stringent
requirements of SEMI E49.8-96. With the proprietary Membralox® ceramic
element and 316L VAR stainless steel housing, the SCF series UHP filter
is a solution for many demanding gas filtering applications.
Specifications
Working Pressure
Differential Pressure
Temperature
Maximum Flow Rate
Body Material
Internal Surface Finish
Element
• Material
• Removal Rating
End Connections
• Type
• Size |
Up to 3000 psig (206 bar)
Up to 2500 psi (172 bar)
Up to 400°F (200°C)
2700 std L/min
316L VAR stainless steel
Electropolished, 5 µin. (0.13 µm) Ra
High-purity alumina
> 99.9999999 % at 0.0003 µm
VCR® face seal fittings
1/4, 1/2, and 3/4 in. |
Features
- Membralox ceramic filtration technology
- High particle removal efficiency
- Exceptionally low particle shedding
- Superior moisture dry-down characteristics
- Extremely low outgassing
- Outstanding chemical compatibility
- High differential pressure rating
- Inline, all-welded construction
Membralox Ceramic Filtration Technology
|
|
| The ceramic element is a multichannel
block or tubular configuration of high-purity alumina. |
A scanning electron microscope image
shows the two membrane layers of the filter element: ultrafine and
fine (top to bottom). |
The Membralox ceramic element is a multilayered filter medium. The
material is a high-purity alumina with a precisely controlled pore
structure.
The Membralox ceramic element is an extruded multiflow channel block or
tubular structure. The flow channels within the structure are coated
with precisely controlled membrane layers. A final sintering process
fuses the layers together.
The result is a filter element that is designed to minimize particle
shedding and provide enhanced flow characteristics. The removal rating
of the filter is greater than 99.9999999 % at 0.003 µm when tested in
accordance with SEMI F38-0699.
The Membralox ceramic element provides both high temperature and
chemical resistance, along with superior particle removal and outgassing
characteristics.
Testing
Every SCF series filter is helium leak tested to a maximum leak rate of
9 × 10
–9
std cm
3
/s. The SCF series filter design has been helium leak tested to a
maximum leak rate of 2 × 10
–10
std cm
3
/s.
Cleaning and Packaging
Every SCF series filter is processed in accordance with Swagelok
Ultrahigh-Purity Process Specification (SC-01).