Swagelok® Filters— High Purity
Filters- All-Welded Inline and SCF Series Ultrahigh-Purity (UHP) Gas
offers a variety of high purity filters.
- All-Welded Inline
- SCF Series Ultrahigh-Purity (UHP) Gas Filters
SCF Series Ultrahigh-Purity (UHP) Gas Filters
The Swagelok SCF series UHP gas filter is designed to meet the stringent
requirements of SEMI E49.8-96. With the proprietary Membralox® ceramic
element and 316L VAR stainless steel housing, the SCF series UHP filter
is a solution for many demanding gas filtering applications.
Maximum Flow Rate
Internal Surface Finish
• Removal Rating
Up to 3000 psig (206 bar)
Up to 2500 psi (172 bar)
Up to 400°F (200°C)
2700 std L/min
316L VAR stainless steel
Electropolished, 5 µin. (0.13 µm) Ra
> 99.9999999 % at 0.0003 µm
VCR® face seal fittings
1/4, 1/2, and 3/4 in.