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Home > Products > Filters > High Purity

High Purity

All-Welded Inline Filters
All-Welded Inline
High Purity Filters
Ultrahigh-Purity Gas Filters
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Swagelok® Filters— High Purity Filters- All-Welded Inline and SCF Series Ultrahigh-Purity (UHP) Gas Filters

General-Service Filters

Swagelok® offers a variety of high purity filters.


  • All-Welded Inline
  • SCF Series Ultrahigh-Purity (UHP) Gas Filters

All-Welded Inline Filters (FW Series)

All Welded Inline FW Series

Specifications

Working Pressure
Differential Pressure
Temperature
Body Material
Element
• Material

• Nominal Pore Size
End Connections
• Type

• Size

 

Up to 6000 psig (413 bar)
Up to 600 psi (41.3 bar)
–20 to 900°F (–28 to 482°C)
316 stainless steel

Sintered 316L stainless steel or pleated mesh stainless steel
0.5 through 15 µm

Swagelok tube fittings, NPT, VCR®­ face seal fittings
1/4 in.; 6 mm

SCF Series Ultrahigh-Purity (UHP) Gas Filters

Ultrahigh Purity Gas Filter

The Swagelok SCF series UHP gas filter is designed to meet the stringent requirements of SEMI E49.8-96. With the proprietary Membralox® ceramic element and 316L VAR stainless steel housing, the SCF series UHP filter is a solution for many demanding gas filtering applications.

Specifications

Working Pressure
Differential Pressure
Temperature
Maximum Flow Rate
Body Material
Internal Surface Finish
Element
• Material
• Removal Rating
End Connections
• Type
• Size

Up to 3000 psig (206 bar)
Up to 2500 psi (172 bar)
Up to 400°F (200°C)
2700 std L/min
316L VAR stainless steel
Electropolished, 5 µin. (0.13 µm) Ra

High-purity alumina
> 99.9999999 % at 0.0003 µm

VCR® face seal fittings
1/4, 1/2, and 3/4 in.
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