February 24, 2004 05:22 PM Eastern Time
Swagelok Semiconductor Services Company Introduces Atomic Layer Deposition Valve
Swagelok Semiconductor Services Company (SSSC) introduces its newest valve for the semiconductor industry. Now available through Swagelok's network of independent sales and service centers, the Swagelok® ALD series valve is an ultrahigh-purity, pneumatically actuated valve for application in atomic layer deposition (ALD) processes -- an emerging deposition technique in the semiconductor industry.
To meet the stringent demands of atomic layer deposition processing -- the fastest growing segment of semiconductor processing technology -- Swagelok's ALD series valve features rapid actuation speed, with valve actuation times less than 5 milliseconds; and an ultrahigh cycle life -- exceeding 25 million cycles during product evaluation. Our patent-pending flow setting feature enables the consistent delivery of process gas. Manufactured from 316L VIM/VAR stainless steel, the valve body is available with 1/4 inch VCR® and 1/4 inch and 6 mm tube butt weld end connections. Available options include a high-temperature model -- rated for temperatures up to 200 degrees Celsius -- as well as multi-port, multi-valve manifold, and modular surface mount configurations.
Headquartered in Santa Clara, California, with manufacturing and distribution facilities located near Cleveland, Ohio, U.S.A., Swagelok Semiconductor Services Company is a strategic business unit of Swagelok Company, dedicated to developing and manufacturing fluid system component technology for the global semiconductor manufacturing industry. For more information, visit the Web site at www.swagelok.com
Contacts
Swagelok Company
Janice Drost, 440-349-5934
janice.drost@swagelok.com |