July 13, 2005 04:29 PM Eastern Time
Swagelok Company Expands Atomic Layer Deposition (ALD) Valve Product Line; ALD6 Series High-Flow Valve is Latest Addition
The Swagelok(R) ALD6 series high-flow diaphragm valve is the latest addition to the atomic layer deposition (ALD) valve product line. This ultrahigh-purity, pneumatically actuated valve features a flow coefficient of 0.62. Swagelok Company's patent-pending flow setting feature allows flow to be set after the valve is assembled to maximize valve-to-valve flow consistency and enhance process stability.
Manufactured from 316L VIM/VAR stainless steel, the ALD6 series valve body is available with 1/4 and 1/2 inch VCR(R) face seal fitting, as well as 3/8 and 1/2 inch and 10 and 12 mm tube butt weld end connections. An Elgiloy(R) diaphragm provides an excellent combination of corrosion resistance, strength, and fatigue characteristics.
The entire Swagelok ALD diaphragm valve line is designed for the performance demands of atomic layer deposition processing, while providing the cleanliness required in a semiconductor application. Valves feature a rapid actuation speed of less than 5 milliseconds and ultrahigh cycle life--more than 25 million cycles during product evaluation. Available options include a high-temperature model--rated for temperatures up to 392 degrees F (200 degrees C)--as well as multi-port, multi-valve manifold, and modular surface mount configurations.
Headquartered in Santa Clara, California, with manufacturing and distribution facilities located near Cleveland, Ohio, U.S.A., Swagelok Semiconductor Services Company is a strategic business unit of Swagelok Company, dedicated to developing and manufacturing fluid system component technology for the global semiconductor manufacturing industry. For more information, visit the Web site at www.swagelok.com
Contacts
Swagelok Company
Janice Drost, 440-349-5934
janice.drost@swagelok.com
or
Marcus Thomas LLC
Tim Bennett, 216-292-4700
tbennett@marcushthomasllc.com
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