April 13, 2004 11:25 AM Eastern Time
New UHP Manual Gas Pressure Regulator for Swagelok Modular Platforms Reduces System Footprint
A new ultrahigh-purity, manually adjustable Swagelok® HFE series gas pressure regulator, designed for 1 1/8 in. C-ring integrated gas systems, is introduced by Swagelok Semiconductor Services Company. Allowing for close spacing of system components and process lines, this compact design supports flow rates up to 160 std L/min and maximum inlet pressures up to 150 psig (10.3 bar). A tied poppet provides a positive-shutoff and metal-to-metal seal to atmosphere for ultrahigh-purity applications.
An innovative, pressure-sensing assembly interacts with a load spring to provide excellent lock-up performance, while precisely controlling outlet pressures. Two outlet pressure ranges are available--vacuum to 30 psig (2.0 bar) and vacuum to 60 psig (4.1 bar). The HFE series regulator is assembled, double-bagged, and vacuum-sealed in an ISO Class 4 clean room and features a 316L VIM-VAR stainless steel body internally electropolished and finished to 5 microinches (0.13 micrometers) Ra.
Headquartered in Santa Clara, California, with manufacturing and distribution facilities located near Cleveland, Ohio, U.S.A., Swagelok Semiconductor Services Company is a strategic business unit of Swagelok Company, dedicated to developing and manufacturing fluid system component technology for the global semiconductor manufacturing industry. For more information, visit www.swagelok.com/semiconductor.
Note to Editors: In the second graph of this release, the "a" in "Ra" should be subscript.
Contacts
Swagelok Company
Janice Drost, 440-349-5934
janice.drost@swagelok.com |