June 08, 2005 02:26 PM Eastern Time
Swagelok Launches Pneumatically Actuated UHP Fluoropolymer 3-Way Diaphragm Valve
Swagelok Semiconductor Services Company introduces the pneumatically actuated DRP series 3-way diaphragm valve, expanding its award-winning ultrahigh-purity fluoropolymer diaphragm valve offering. Meeting SEMI Standard F57-0301 for ultrahigh-purity polymer system components, the new valve has many applications, including aggressive CMP slurry, acid, chemical, and ultrahigh-purity DI water delivery systems. All wetted parts are made from DuPont® Teflon® modified PTFE and PFA.
Designed for use in semiconductor industry ultrahigh-purity chemical distribution systems, the unique patented design features of the DRP series valve minimize entrapment areas and enhance diaphragm performance. A hemispherical valve cavity and patented diaphragm shape enable rapid and thorough cleaning of all wetted surfaces. The shape of the modified PTFE diaphragm minimizes stress during cycling to promote durability, seal integrity, and long cycle life. In addition, the web thickness of the diaphragm has been maximized to reduce the potential for acid permeation.
DRP series 3-way diaphragm valves are available with polypropylene pneumatic actuators. Available end connections include ISO, NPT, fine thread flare, and Nippon Pillar(R) Super 300. This Swagelok DRP technology also is available in customized manifold configurations.
Headquartered in Santa Clara, California, with manufacturing and distribution facilities located near Cleveland, Ohio, U.S.A., Swagelok Semiconductor Services Company is a strategic business unit of Swagelok Company, dedicated to developing and manufacturing fluid system component technology for the global semiconductor manufacturing industry. For more information, visit www.swagelok.com.
Contacts
Swagelok Company
Janice Drost, 440-349-5934
janice.drost@swagelok.com
or
Marcus Thomas LLC
Tim Bennett, 216-292-4700
tbennett@marcushthomasllc.com |