October 04, 2004 02:26 PM Eastern Time
Swagelok ALD Diaphragm Valve Wins Gases and Technology 2004 Product Innovation Award
The atomic layer deposition (ALD) diaphragm valve manufactured by Swagelok Semiconductor Services Company (SSSC) was awarded the Gases and Technology 2004 Product Innovation Award as the best technology application in semiconductors. The valve was chosen by a panel of industry experts based on the impact the product technology will have on the advancement of next generation semiconductor processes.
"We are honored to receive this award, recognizing our efforts to provide enabling technology to ALD processes," said Phil Roberts, president, SSSC. "The timely development of this leading-edge ALD valve is a result of strong cooperation between Swagelok engineers and leading OEMs in the semiconductor equipment market."
The Swagelok ALD diaphragm valve is an ultrahigh-purity, pneumatically actuated valve for application in atomic layer deposition processing -- the controlled, rapid deposition of film on a substrate or wafer, one atomic layer at a time. The innovative design of Swagelok's ALD valve meets the stringent demands of ALD processing by enabling rapid actuation speed, with valve actuation times less than 5 milliseconds; and an ultrahigh cycle life -- exceeding 25 million cycles during product evaluation. Roberts concluded, "The performance characteristics and reliability of this valve will be key to the successful development of next generation chips at the world's leading wafer fabs."
Sponsored by Gases & Technology Magazine, the Gases and Technology Product Innovation Awards recognize product innovation and excellence in gas handling technology. Written for engineers, senior technical managers, and researchers, Gases and Technology Magazine is the primary information resource for news and technical developments in industrial, specialty and medical gas markets.
Headquartered in Santa Clara, California, with manufacturing and distribution facilities located near Cleveland, Ohio, U.S.A., Swagelok Semiconductor Services Company is a strategic business unit of Swagelok Company, dedicated to developing and manufacturing fluid system component technology for the global semiconductor manufacturing industry. For more information, visit the company's Web site at www.swagelok.com/semiconductor. Contacts
Swagelok Company
Janice Drost, 440-349-5934
janice.drost@swagelok.com
OR
Marcus Thomas LLC
Tim Bennett, 216-292-4700
tbennett@marcusthomasllc.com |