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Swagelok® IGC® II Integrated Gas Components
1.5 in (38.1 mm) C-Ring Modular Design for Ultrahigh-Purity (UHP) Systems
The Swagelok IGC II system consists of lightweight, easy-to-assemble components and standard hardware that can be customized for any flow configuration.Ultrahigh-purity processing in accordance with Swagelok SC-01 is standard for substrate and manifold components. The IGC II System Configurator simplifies the layout, selection, and ordering of IGC II integrated gas system components.

Substrate/Manifold
Specifications
• Pressure Rating at 70°F (20°C)
• Temperature Rating

• Wetted Materials
• Internal Surface Finish



3000 psig (206 bar)

248°F (120°C) operating
302°F (150°C) bakeout
316L VIM-VAR stainless steel

5 µin. (0.13 µm) Ra
IGC II integrated gas system

More Information
Download the IGC II Integrated Gas Components—Substrates, Manifolds, Mounting Components, and Assembly Hardware catalog.
Download the Modular Surface Mount Components and Seals catalog.
Download the Pressure Transducers, Ultrahigh Purity catalog.
Download the Diaphragm Valves for Atomic Layer Deposition catalog.
Download the IGC II Gas Distribution System Technical Report.
Download the IGC II Integrated Gas Components Assembly and Service Instructions.
Download the IGC II System Configurator.
Find ultrahigh-purity IGC II integrated gas components in the product search.
Find ultrahigh-purity modular surface mount pressure transducers in the product search.

Features

IGC II integrated gas system substrate-manifold assembly IGC II surface mount components

A typical IGC II system consists of three layers—a substrate assembly, a manifold assembly, and mounting components.

  • The substrate assembly provides the flow path for the process gas through the gas stick.
  • The manifold assembly provides the flow path between two or more parallel gas sticks.
  • The substrate-manifold assembly accepts any 1.5 in. (38.1 mm) C-ring surface-mount component.

A conversion plate provides the mounting capacity for a mass flow controller, and a tube port is available to provide a 1/4 in. vertical tube port on a manifold or substrate.


Swagelok Surface-Mount Components

  • Low-pressure diaphragm valves, DP series
  • Bellows-sealed metering valves, BM series
  • Atomic layer deposition valves, ALD valves
  • High-flow regulators, HF series
  • Ultrahigh-purity pressure gauges,
    PGU series
  • Ultrahigh-purity pressure transducers,
    PTU series

Gaskets and Gasket Assemblies

  • C-ring style seal for a 1.5 in. (38.1 mm) modular system
  • 316L stainless steel material of construction
  • Helium leak-tight integrity to less than 1 × 10–9 std cm3/s

IGC II System Configurator
This download program simplifies the layout, selection, ordering, and assembly of IGC II integrated gas components. It automates the process of converting a conventional gas distribution design into a IGC II-based design, and produces a bill of materials and an assembly diagram.


























Swagelok Manchester

3 Kelvin Close, Science Pk. N.
Birchwood, Warrington
Cheshire WA3 7WF
England

(44)(1925) 822662
info@Manchester.swagelok.com