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Semiconductor 
To meet customer needs in the ever-evolving semiconductor manufacturing industry, Swagelok provides next generation process enabling solutions for FEOL and BEOL applications that utilize processes such as ALD, CMP, wafer cleaning, copper deposition, cobalt deposition, CVD, PVD, LCD, and flat panel.

Utilizing its engineering and manufacturing expertise, the company has consistently developed engineered solutions and innovative ultrahigh-purity products, including ALD diaphragm valves and DRP series fluoropolymer valves in addition to benchmark-setting Swagelok® VCR® and Micro-Fit® fittings.
Products for Semiconductor
Swagelok offers a broad line of high-purity and ultrahigh-purity fluid system components for semiconductor applications, including diaphragm valves, fluoropolymer valves and tubing, PFA fittings, ceramic filters, UHP transducers, IGC® II modular gas systems, and vertical flow sensors.


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Ultrahigh-purity SCFseries filters
Swagelok® SCF Series Ultrahigh-Purity Gas Filters
The Swagelok SCF series UHP gas filter is designed to meet the stringent requirements of SEMI E49.8-96. With the proprietary Membralox® ceramic element and 316L VAR stainless steel housing, the SCF series UHP filter is a solution for many demanding gas filtering applications.