Ready to reduce atomic layer deposition costs?

Servicing clogged or failed ALD valves is a production and
maintenance nightmare. So are ALD valves that under-perform,
usually the result of poor flow characteristics. Swagelok ALD valves are
designed to eliminate these problems and lower a system’s
total cost of ownership.


  • Valve diaphragms meet the precision and life-cycle requirements
    most appropriate for semiconductor wafer production
  • More than 100 million life cycles means Swagelok ALD valves rarely need replacing
  • Less valve maintenance improves productivity, increasing ROI
  • Valves are set to within 3 percent of the targeted Cv for reliable, repeatable
    results -- well below the 10 percent industry standard
  • Swagelok ALD valve reliability means less time and tools are needed to monitor
    the deposition process
  • From Swagelok, the company that set the standard for ALD processing technology


Let us prove how easy it is to reduce costs
with these valves.

Speak with your Swagelok sales and service representative.
View or download a Swagelok ALD diaphragm valves catalog.