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Components For Heat Transfer System Coolants
Minimized PFPE Coolant Loss, Better Tool Utilization
 PFPE is fast becoming the semiconductor industry’s system coolant of choice. Due to their properties, PFPE fluids work well in heat transfer systems for semiconductor applications, but some users have encountered seal problems with these fluids, resulting in expensive leakage. That’s why Swagelok has developed a specific valve sub-assembly solution superior to common elastomer O-ring plug valves.
Swagelok’s ball valve design with silicone flange seals have proven to provide superior PFPE fluid sealing compared to common plug valves.
Other Swagelok components providing reliable, leak-tight performance include genuine Swagelok VCR® metal gasket face seal end connections, quick connects, and hoses. Avoid the costly loss of PFPE fluids and eliminate costly unplanned downtime associated with replacing seals and repairing leaks.
All available now for new tool production or field replacement in existing systems. |
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