Swagelok® Fluid System Components 
 Innovate With Reliability  

Aiming to make the next semiconductor innovation? Begin by relying on Swagelok® fluid system components — designed for the future and available now. Swagelok continues their commitment to providing innovative, reliable products that remain ahead of the curve so you can remain ahead of your competition. 

While you work to improve the semiconductor, we have been working to help you improve your processes with Swagelok components that offer consistent, reliable performance --offering you consistent throughput, decreased downtime, and minimal maintenance costs.  Our comprehensive line includes:

• DRP series ultrahigh-purity fluoropolymer diaphragm valves eliminate virtually all entrapment areas for contamination resistance. They clean rapidly and allow you to more effectively purge process fluids. Download the Ultrahigh-Purity Fluoropolymer Diaphragm Valves - DRP Series Catalog.

• IGC™ II integrated gas systems are lightweight and easy to assemble. Compact footprints and open architecture allow you to make best use of tight space and a variety of readily available components. Download the IGC® II Integrated Gas Components : Substrates, Manifolds, Mounting Components, and Assembly Hardware Catalog.
  

• HF series high performance/high flow gas regulators provide precise consistent pressure control in a compact design. Download the High-Flow, Manual Gas Pressure Regulators - HF Series Catalog.
  

• DP series ultrahigh-purity springless diaphragm valves feature a design that minimizes swelling and provides a fully swept flow path to reduce chances of contamination and help ensure unrestricted flow. Download the Springless Diaphragm Valves For High Performance - DP Series Catalog.
  

• SCF series ultrahigh-purity gas ceramic filters minimize moisture absorption, delamination, particle shedding, and the risk of system contamination. Download the Ultrahigh-Purity Gas Filters - SCF Series Catalog.
  

• PGU series pressure gauges are available with genuine Swagelok VCR® face seal gasket fittings and IGC II surface mount end connections. Download the Pressure Gauges, Ultrahigh-Purity and Clean Dry Air - PGU and PGC Series Catalog.

• VCR
metal face seal and Micro Fit® weld fittings have proven to be extremely reliable in semiconductor fluid system applications. Download the VCR Metal Gasket Face Seal Fitting Catalog and the Weld Fittings, Ultrahigh-Purity, Specially Cleaned, and Industrial Catalog.