UHP Filters – SCF Series Ultrahigh Purity Filter

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Swagelok® SCF Series Ultrahigh-Purity (UHP) Gas Filters
The Swagelok SCF series UHP gas filter is designed to meet the stringent requirements of SEMI E49.8-96. With the proprietary Membralox® ceramic element and 316L VAR stainless steel housing, the SCF series UHP filter is a solution for many demanding gas filtering applications.

Specifications
Working Pressure
Differential Pressure
Temperature
Maximum Flow Rate
Body Material
Internal Surface Finish
Element
• Material
• Removal Rating
End Connections
• Type
• Size

Up to 3000 psig (206 bar)
Up to 2500 psi (172 bar)
Up to 400°F (200°C)
2700 std L/min
316L VAR stainless steel
Electropolished, 5 µin. (0.13 µm) Ra

High-purity alumina
> 99.9999999 % at 0.0003 µm

VCR® face seal fittings
1/4, 1/2, and 3/4 in.

More Information
Download the Ultrahigh-Purity Gas Filters—SCF Series catalog.
Download the SCF Series Ultrahigh-Purity Gas Filters Technical Report.
Find ultrahigh-purity gas filters in the product search.

Other Filters
General-service all-welded inline, inline, and tee-type filters
Coalescing and particulate gas filters

Features

Membralox ceramic filtration technology
High particle removal efficiency
Exceptionally low particle shedding
Superior moisture dry-down characteristics
Extremely low outgassing
Outstanding chemical compatibility
High differential pressure rating
Inline, all-welded construction

Membralox Ceramic Filtration Technology


The ceramic element is a multichannel block or tubular configuration of high-purity alumina.	A scanning electron microscope image shows the two membrane layers of the filter element: ultrafine and fine (top to bottom).

The Membralox ceramic element is a multilayered filter medium. The material is a high-purity alumina with a precisely controlled pore structure.

The Membralox ceramic element is an extruded multiflow channel block or tubular structure. The flow channels within the structure are coated with precisely controlled membrane layers. A final sintering process fuses the layers together.

The result is a filter element that is designed to minimize particle shedding and provide enhanced flow characteristics. The removal rating of the filter is greater than 99.9999999 % at 0.003 µm when tested in accordance with SEMI F38-0699.

The Membralox ceramic element provides both high temperature and chemical resistance, along with superior particle removal and outgassing characteristics.

Testing
Every SCF series filter is helium leak tested to a maximum leak rate of 9 × 10^–9 std cm³/s. The SCF series filter design has been helium leak tested to a maximum leak rate of 2 × 10^–10 std cm³/s.

Cleaning and Packaging
Every SCF series filter is processed in accordance with Swagelok Ultrahigh-Purity Process Specification (SC-01).

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