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> Ultrahigh-Purity Gas Filters—SCF Series
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Swagelok® SCF Series Ultrahigh-Purity Gas Filters
The Swagelok SCF series UHP gas filter is designed to meet the stringent requirements of SEMI E49.8-96. With the proprietary Membralox® ceramic element and 316L VAR stainless steel housing, the SCF series UHP filter is a solution for many demanding gas filtering applications.
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Specifications
Working Pressure
Differential Pressure
Temperature
Maximum Flow Rate
Body Material
Internal Surface Finish
Element
• Material
• Removal Rating
End Connections
• Type
• Size |
Up to 3000 psig (206 bar)
Up to 2500 psi (172 bar)
Up to 400°F (200°C)
2700 std L/min
316L VAR stainless steel
Electropolished, 5 µin. (0.13 µm) Ra
High-purity alumina
> 99.9999999 % at 0.0003 µm
VCR® face seal fittings, IGC® II-compatible modular surface mount
1/4, 1/2, and 3/4 in. |
More Information
Download the Ultrahigh-Purity Gas Filters—SCF Series catalog.
Download the SCF Series Ultrahigh-Purity Gas Filters Technical Report.
Other Filters
General-service all-welded inline, inline, and tee-type filters
Coalescing and particulate gas filters
Features 
- Membralox ceramic filtration technology
- High particle removal efficiency
- Exceptionally low particle shedding
- Superior moisture dry-down characteristics
- Extremely low outgassing
- Outstanding chemical compatibility
- High differential pressure rating
- All-welded construction
- Inline and surface-mount configurations
Membralox Ceramic Filtration Technology
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| The ceramic element is a multichannel block or tubular configuration of high-purity alumina. |
A scanning electron microscope image shows the two membrane layers of the filter element: ultrafine and fine (top to bottom). |
The Membralox ceramic element is a multilayered filter medium. The material is a high-purity alumina with a precisely controlled pore structure.
The Membralox ceramic element is an extruded multiflow channel block or tubular structure. The flow channels within the structure are coated with precisely controlled membrane layers. A final sintering process fuses the layers together.
The result is a filter element that is designed to minimize particle shedding and provide enhanced flow characteristics. The removal rating of the filter is greater than 99.9999999 % at 0.003 µm when tested in accordance with SEMI F38-0699.
The Membralox ceramic element provides both high temperature and chemical resistance, along with superior particle removal and outgassing characteristics.
Testing
Every SCF series filter is helium leak tested to a maximum leak rate of 9 × 10–9 std cm3/s. The SCF series filter design has been helium leak tested to a maximum leak rate of 2 × 10–10 std cm3/s.
Cleaning and Packaging
Every SCF series filter is processed in accordance with Swagelok Ultrahigh-Purity Process Specification (SC-01).
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